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Electronics Industry Emissions 61 Introduction - Emission ...· The gases include CF4, C2F6, C3F8, c-C4F8, c-C4F8O, C4F6, C5F8, CHF3, CH2F2, nitrogen trifluoride (NF3), and sulfur hexafluoride (SF6), and are used in two important steps of electronics manufacturing: (i) plasma etching silicon containing materials and (ii) cleaning chemical vapour deposition (CVD) tool chamber-walls where silicon has ...

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